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두손산업(주)

Suction ETCHING

Global Dooson

How it Works

Suction ETCHING

진공 흡입을 통해 에칭액이 기판에 고여 수막을 형성하는 퍼들링(Puddling)을 없애준다

에칭 편차율을 일반 에칭기보다 5~10% 정도 높여 고른 에칭을 실현, 수율을 20% 정도 높이는 효과가 있다

Suction Flow

Vacuum